Fabrication of L10-FePt Thin Films by Rapid Thermal Annealing.

Authors :: Aimuta, K.
Nishimura, K.
Hashi, S.
Inoue, M.
Source :: IEEE Transactions on Magnetics; Oct2005, Vol. 41 Issue 10, p3898-3900, 3p
Publication Year :: 2005
Abstract: Fabrication of L1<subscript>0</subscript>-FePt thin films by using conventional thermal annealing and indirect rapid thermal annealing is studied. By using conventional thermal annealing, L1<subscript>0</subscript>-FePt thin films are fabricated over 500° C. By using the rapid thermal annealing, it was found that the formation temperature of L1<subscript>0</subscript>-FePt thin films decreases effectively. In addition, this method enables to prevent the grain growth due to annealing. [ABSTRACT FROM AUTHOR]