A Quadratic Differential Feedback Method for Electrochemical Micro Machining.

Machining accuracy of the electrochemical micro machining with pulse voltage mainly depends on pulse width of the voltage signals. To give nanometer level machining resolution, an expensive picoseconds pulse power supply is required. In this paper, a quadratic differential feedback method for electrochemical micro machining is proposed. With the method, nanometer level machining resolution can be obtained easily by tuning feedback loop gain under micro second pulse width. Here, the circuits of the machining system are designed and analyzed, and the circuit equation and transfer function of the system are deduced. By the equation, the basic principle of the machining method is revealed and the equation of the machining resolution for the method is also given. By micro hole machining experiments, effects of the feedback gain on the resolution are investigated and compared with the calculated ones. Good agreement is obtained which illustrates the proposed machining method. Besides it, some micro structures are produced and nanometer level machining resolution is obtained. [ABSTRACT FROM AUTHOR]