A Layered Split Polishing Path Planning Method Used in AWJP Based on Optical Glass Surface Morphology.

With the increasing demand for the performance and accuracy of optical components in the field of technology, optical component processing technology is facing many challenges. Abrasive polishing has become a choice for improving machining accuracy in traditional optical manufacturing due to its characteristics of cold processing and non-contact processing, in order to obtain optical components with higher surface shape accuracy. A layered split polishing path planning method is proposed in this paper, which is based on the optical glass surface topography to plan the polishing path and design the feed rate based on the material removal model. Comparative experiments on polishing with raster path, Hilbert path, and layered split path are carried out on the self-developed abrasive water jet polishing (AWJP) platform, and the peak-to-valley (PV), root mean square (RMS), and power spectral density (PSD) covers of the polished optical glass surface are detected by ZYGO VeriFire laser interferometer. The experimental results show that the PV and RMS of the optical glass surface after polished by the layered split polishing path are less than raster path and Hilbert path, in particular, the PSD curves of the layered split polishing path are significantly lower than the remaining two paths. These prove the layered split polishing path is an effective method which can reduce the surface shape error and restrain the Intermediate frequency error. In general, this work could provide a valuable support for the AWJP process of optical glass and had a certain significance for ultra precision polishing system. [ABSTRACT FROM AUTHOR]