Properties of ZnO and Al Doped ZnO Thin Films Prepared by Spray Pyrolysis.

The Highly transparent and conducting aluminum doped zinc oxide thin films deposited on glass substrate held at 450°C using spray pyrolysis method. The structural analysis by X-rays diffraction showed that the films are of structure wurtzite with a preferential orientation according to the direction (002) for oxide zinc ZnO undoped, on the other that ZnO: Al has a direction (101). The crystallite size was varied from 34 to 36 nm with dopant concentration. The scanning electron microscopy results depicted that the microstructure of ZnO: Al films highly influenced by the aluminum doping. The measures optical showed that ZnO: Al layers have a transmission of about 85% and energy gap of 3.2 eV, 3.4 eV for ZnO:Al and ZnO respectively. The resistivity of the films decreased as increase the dopant concentration and it is 3 × 10⁻² Ω cm for 1 at.% Al beyond which it increased. [ABSTRACT FROM AUTHOR]