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Process optimization of wet etching for split gate trench MOSFET.
- Source :
- Journal of Physics: Conference Series; 2024, Vol. 2859 Issue 1, p1-9, 9p
- Publication Year :
- 2024
Details
- Language :
- English
- ISSN :
- 17426588
- Volume :
- 2859
- Issue :
- 1
- Database :
- Complementary Index
- Journal :
- Journal of Physics: Conference Series
- Publication Type :
- Academic Journal
- Accession number :
- 180404286
- Full Text :
- https://doi.org/10.1088/1742-6596/2859/1/012003