Carrier Mobility Enhancement in Ultrathin-Body InGaAs-on-Insulator n-Channel Metal-Oxide-Semiconductor Field-Effect Transistors Based on Dual-Gate Modulation.

As a promising candidate for More Moore technology, InGaAs-based n-channel metal-oxide-semiconductor field-effect transistors (nMOSFETs) have attracted growing research interest, especially with InGaAs-on-insulator (InGaAs-OI) configurations aimed at alleviating the short channel effects. Correspondingly, the fabrication of an ultrathin InGaAs body becomes necessary for the full depletion of the channel, while the deteriorated semiconductor–insulator interface-related scattering could severely limit carrier mobility. This work focuses on the exploration of carrier mobility enhancement strategies for 8 nm body-based InGaAs-OI nMOSFETs. With the introduction of a bottom gate bias on the substrate side, the conduction band structure in the channel was modified, relocating the carrier wave function from the InGaAs/Al₂O₃ interface into the body. Resultantly, the channel mobility with an inversion layer carrier concentration of 1 × 10¹³ cm⁻² was increased by 62%, which benefits InGaAs-OI device application in monolithic 3D integration. The influence of the dual-gate bias from front gate and bottom gate on gate stability was also investigated, where it has been unveiled that the introduction of the positive bottom gate bias is also beneficial for gate stability with an alleviated orthogonal electric field. [ABSTRACT FROM AUTHOR]