The Theory of Axial Tomography Based on the Inverse Radon Transform for High-Aperture Soft X-ray Microscopy.

For soft X-ray microscopy in the approximation of geometrical optics, a theoretical model for the formation of the received image is constructed – a relationship is found between the image recorded on the detector and the 3D distribution of the sample absorption index using a high-aperture mirror objective (NA ¿ 0.3) with a focus depth close to the diffraction limit. The solution of the inverse problem of tomography for determining this 3D distribution from the data of measurements in a high-aperture mirror SXR-microscope is obtained. [ABSTRACT FROM AUTHOR]