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Simulation of mode transitions in capacitively coupled Ar/O2 plasmas.
- Source :
- Plasma Science & Technology; Nov2024, Vol. 26 Issue 11, p1-11, 11p
- Publication Year :
- 2024
Details
- Language :
- English
- ISSN :
- 10090630
- Volume :
- 26
- Issue :
- 11
- Database :
- Complementary Index
- Journal :
- Plasma Science & Technology
- Publication Type :
- Academic Journal
- Accession number :
- 179795079
- Full Text :
- https://doi.org/10.1088/2058-6272/ad668d