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Inherent area selective deposition of silicon dioxide in multilayer 3D SiOx–SiNx stacks.
- Source :
- Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Sep2024, Vol. 42 Issue 5, p1-8, 8p
- Publication Year :
- 2024
-
Abstract
- Device scaling for future semiconductor technologies is driving the adoption of innovative methods for miniaturizing semiconductor chips. One promising approach that has garnered significant interest for sub-10 nm device scaling is area selective deposition (ASD). In this study, we demonstrate the feasibility of ASD of silicon dioxide (SiO<subscript>2</subscript>) on –OH terminated surfaces (silicon oxide: SiO<subscript>x</subscript>) but not on –NH terminated surfaces (silicon nitride: SiN<subscript>x</subscript>) for 2D blanket, 2D patterned, and 3D stacks using a novel precursor: Orthrus. To achieve this, we optimized the SiO<subscript>x</subscript> and SiN<subscript>x</subscript> layers to enhance the –OH and –NH surface bonds, respectively. Using x-ray photo spectroscopy analysis, we showed that SiO<subscript>2</subscript> selectively deposits on SiO<subscript>x</subscript> without any nucleation delay compared to SiN<subscript>x</subscript>. We have demonstrated the inherent selective deposition of approximately ∼4 nm on 2D patterned structures and ∼3.7 nm on 3D stacks by fine-tuning the atomic layer deposition process. This selective thickness is >250% compared to a previously shown selective SiO<subscript>2</subscript> deposition process in the literature. Finally, we also showed that the step coverage of selective SiO<subscript>2</subscript> growth in 3D stacks is ∼1. This study highlights the potential pathway for performing ASD of commonly used SiO<subscript>2</subscript> in 3D high-aspect-ratio stacks. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 07342101
- Volume :
- 42
- Issue :
- 5
- Database :
- Complementary Index
- Journal :
- Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films
- Publication Type :
- Academic Journal
- Accession number :
- 179513384
- Full Text :
- https://doi.org/10.1116/6.0003790