Design and Fabrication of Micro/Nano Sensors and Actuators.

This document discusses the design and fabrication of micro/nano sensors and actuators, specifically focusing on micro-electromechanical systems (MEMS). MEMS devices integrate various components such as sensors, converters, and actuators into one or more chips. These devices are made from materials like silicon, metal, ceramics, and glass, which greatly influence their performance. The document also highlights the importance of process manufacturing in determining the reliability and performance of MEMS devices. The Special Issue included in the document features 11 papers that explore different aspects of MEMS/NEMS, including device design, materials, and manufacturing processes. [Extracted from the article]