Substrate-dependent structural evolution during the oxidation of SiNx thin films.

MLA

Jung, Gowun, et al. “Substrate-Dependent Structural Evolution during the Oxidation of SiNx Thin Films.” Journal of Materials Science, vol. 59, no. 23, June 2024, pp. 10432–43. EBSCOhost, https://doi.org/10.1007/s10853-024-09751-w.

APA

Jung, G., Kim, S., Eom, J., Song, I. Y., Lee, J., Cho, S.-K., Lee, W.-E., Heo, K., Cho, T.-Y., & Yun, H. (2024). Substrate-dependent structural evolution during the oxidation of SiNx thin films. Journal of Materials Science, 59(23), 10432–10443. https://doi.org/10.1007/s10853-024-09751-w

Chicago

Jung, Gowun, Sehun Kim, Jiho Eom, In Young Song, Jinhee Lee, Seong-Keun Cho, Wang-Eun Lee, Kyuyoung Heo, Tae-Yeon Cho, and Hwanhui Yun. 2024. “Substrate-Dependent Structural Evolution during the Oxidation of SiNx Thin Films.” Journal of Materials Science 59 (23): 10432–43. doi:10.1007/s10853-024-09751-w.