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Effect of Adding Al on the Phase Structure and Gettering Performance of TiZrV Non-Evaporable Getter Materials.
- Source :
- Materials (1996-1944); May2024, Vol. 17 Issue 9, p1969, 14p
- Publication Year :
- 2024
-
Abstract
- Titanium zirconium vanadium (TiZrV) is a widely used non-evaporable getter (NEG) material with the characteristics of a low activation temperature and a large gas absorption capacity. At present, the research on TiZrV getters mainly focuses on the thin-film state, with little research on the bulk state. In this paper, a TiZrV getter was optimized by adding Al, and the phase structure, activation properties, and gettering performance were studied. With the addition of Al, the α-Zr phase and Ti<subscript>2</subscript>Zr phase changed into the Ti-Zr phase and Al-Zr, Al-Ti phase. The newly generated phase promoted the diffusion of hydrogen and oxygen atoms. The activation temperature decreased significantly, as shown in the in situ XPS results. The H<subscript>2</subscript> and CO gettering performance of TiZrVAl samples was promoted to 2073 cm<superscript>3</superscript>·s<superscript>−1</superscript> and 1912.8 cm<superscript>3</superscript>·s<superscript>−1</superscript>, increased by 40.7% and 40.3%. This paper provides valuable ideas for optimizing the properties of bulk TiZrV getters. [ABSTRACT FROM AUTHOR]
- Subjects :
- GETTERING
GAS absorption & adsorption
LOW temperatures
ZIRCONIUM
VANADIUM
Subjects
Details
- Language :
- English
- ISSN :
- 19961944
- Volume :
- 17
- Issue :
- 9
- Database :
- Complementary Index
- Journal :
- Materials (1996-1944)
- Publication Type :
- Academic Journal
- Accession number :
- 177185011
- Full Text :
- https://doi.org/10.3390/ma17091969