Focused Electron Beam Micro- and Nanopatterning of Thin Films Derived from Sol–Gels Based on TiO2 Precursors for Planar Photonics.

MLA

Rola, Krzysztof P., et al. “Focused Electron Beam Micro- and Nanopatterning of Thin Films Derived from Sol–Gels Based on TiO2 Precursors for Planar Photonics.” ACS Applied Nano Materials, vol. 7, no. 8, Apr. 2024, pp. 8692–702. EBSCOhost, https://doi.org/10.1021/acsanm.4c00060.

APA

Rola, K. P., Duda, Ł., Gorantla, S., Czyż, K., Guzik, M., & Cybińska, J. (2024). Focused Electron Beam Micro- and Nanopatterning of Thin Films Derived from Sol–Gels Based on TiO2 Precursors for Planar Photonics. ACS Applied Nano Materials, 7(8), 8692–8702. https://doi.org/10.1021/acsanm.4c00060

Chicago

Rola, Krzysztof P., Łukasz Duda, Sandeep Gorantla, Krzysztof Czyż, Małgorzata Guzik, and Joanna Cybińska. 2024. “Focused Electron Beam Micro- and Nanopatterning of Thin Films Derived from Sol–Gels Based on TiO2 Precursors for Planar Photonics.” ACS Applied Nano Materials 7 (8): 8692–8702. doi:10.1021/acsanm.4c00060.