Effect of fabrication parameters on the ferroelectricity of hafnium zirconium oxide films: A statistical study.

MLA

Salcedo, Guillermo A., et al. “Effect of Fabrication Parameters on the Ferroelectricity of Hafnium Zirconium Oxide Films: A Statistical Study.” Journal of Applied Physics, vol. 135, no. 12, Mar. 2024, pp. 1–8. EBSCOhost, https://doi.org/10.1063/5.0191420.

APA

Salcedo, G. A., Islam, A. E., Reichley, E., Dietz, M., Schubert-Kabban, C. M., Leedy, K. D., Back, T. C., Wang, W., Green, A., Wolfe, T., & Sattler, J. M. (2024). Effect of fabrication parameters on the ferroelectricity of hafnium zirconium oxide films: A statistical study. Journal of Applied Physics, 135(12), 1–8. https://doi.org/10.1063/5.0191420

Chicago

Salcedo, Guillermo A., Ahmad E. Islam, Elizabeth Reichley, Michael Dietz, Christine M. Schubert-Kabban, Kevin D. Leedy, Tyson C. Back, et al. 2024. “Effect of Fabrication Parameters on the Ferroelectricity of Hafnium Zirconium Oxide Films: A Statistical Study.” Journal of Applied Physics 135 (12): 1–8. doi:10.1063/5.0191420.