Study on annealing effect of Ti-doped Gd2O3 films for high k dielectrics.

Details

Language :

English

ISSN :

17426588

Volume :

2713

Issue :

1

Database :

Complementary Index

Journal :

Journal of Physics: Conference Series

Publication Type :

Academic Journal

Accession number :

175897467

Full Text :

https://doi.org/10.1088/1742-6596/2713/1/012061