Anisotropic etching behavior and topography formation mechanism of silicon solar cell surface textured by atmospheric plasma.

MLA

Zhang, Peng, et al. “Anisotropic Etching Behavior and Topography Formation Mechanism of Silicon Solar Cell Surface Textured by Atmospheric Plasma.” Journal of Applied Physics, vol. 135, no. 6, Feb. 2024, pp. 1–12. EBSCOhost, https://doi.org/10.1063/5.0191133.

APA

Zhang, P., Tian, H., Liu, J., Zhao, Y., Cao, X., & Yu, D. (2024). Anisotropic etching behavior and topography formation mechanism of silicon solar cell surface textured by atmospheric plasma. Journal of Applied Physics, 135(6), 1–12. https://doi.org/10.1063/5.0191133

Chicago

Zhang, Peng, Hengxi Tian, Jinwei Liu, Yingxin Zhao, Xiuquan Cao, and Deping Yu. 2024. “Anisotropic Etching Behavior and Topography Formation Mechanism of Silicon Solar Cell Surface Textured by Atmospheric Plasma.” Journal of Applied Physics 135 (6): 1–12. doi:10.1063/5.0191133.