Cite
Gas-Delivery Fluid-Mechanical Timescales in Semiconductor Manufacturing.
MLA
Gonzalez-Juez, E. “Gas-Delivery Fluid-Mechanical Timescales in Semiconductor Manufacturing.” IEEE Transactions on Semiconductor Manufacturing, vol. 37, no. 1, Feb. 2024, pp. 38–45. EBSCOhost, https://doi.org/10.1109/TSM.2023.3327067.
APA
Gonzalez-Juez, E. (2024). Gas-Delivery Fluid-Mechanical Timescales in Semiconductor Manufacturing. IEEE Transactions on Semiconductor Manufacturing, 37(1), 38–45. https://doi.org/10.1109/TSM.2023.3327067
Chicago
Gonzalez-Juez, E. 2024. “Gas-Delivery Fluid-Mechanical Timescales in Semiconductor Manufacturing.” IEEE Transactions on Semiconductor Manufacturing 37 (1): 38–45. doi:10.1109/TSM.2023.3327067.