The Energy Flux to the Substrate in the High-Power Impulse Magnetron Sputtering of Copper Films.

MLA

Oskirko, V. O., et al. “The Energy Flux to the Substrate in the High-Power Impulse Magnetron Sputtering of Copper Films.” Bulletin of the Russian Academy of Sciences: Physics, vol. 87, Dec. 2023, pp. S255–61. EBSCOhost, https://doi.org/10.1134/S1062873823704695.

APA

Oskirko, V. O., Zakharov, A. N., Grenadyorov, A. S., Semenov, V. A., & Solovyev, A. A. (2023). The Energy Flux to the Substrate in the High-Power Impulse Magnetron Sputtering of Copper Films. Bulletin of the Russian Academy of Sciences: Physics, 87, S255–S261. https://doi.org/10.1134/S1062873823704695

Chicago

Oskirko, V. O., A. N. Zakharov, A. S. Grenadyorov, V. A. Semenov, and A. A. Solovyev. 2023. “The Energy Flux to the Substrate in the High-Power Impulse Magnetron Sputtering of Copper Films.” Bulletin of the Russian Academy of Sciences: Physics 87 (December): S255–61. doi:10.1134/S1062873823704695.