Efficient photo-dissociation-induced production of hydrogen radicals using vacuum ultraviolet light from a laser-produced plasma.

One of the critical issues in lithography using extreme ultraviolet (EUV) light is tin contamination of the EUV collector mirrors in the tin-based LPP-EUV light source. The contamination can be removed by the reaction of tin atoms with hydrogen radicals producing stannane (SnH₄), which is gaseous at the normal temperature. Hydrogen radicals can be produced from hydrogen molecules through photo-dissociation and photo-ionization induced by broadband radiation emitted from the EUV light source. In this work, an efficient production of hydrogen radical using vacuum ultraviolet (VUV) light emitted from laser-produced high-Z plasma is experimentally demonstrated. A two-dimensional radiation hydrodynamic simulation, coupled with photoionization and photo-dissociation cross sections, also shows the efficient hydrogen radical production by increased VUV light emission, as observed in the experiment. [ABSTRACT FROM AUTHOR]