An Improved 3D OPC Method for the Fabrication of High-Fidelity Micro Fresnel Lenses.

MLA

Peng, Fei, et al. “An Improved 3D OPC Method for the Fabrication of High-Fidelity Micro Fresnel Lenses.” Micromachines, vol. 14, no. 12, Dec. 2023, p. 2220. EBSCOhost, https://doi.org/10.3390/mi14122220.

APA

Peng, F., Sun, C., Wan, H., & Gui, C. (2023). An Improved 3D OPC Method for the Fabrication of High-Fidelity Micro Fresnel Lenses. Micromachines, 14(12), 2220. https://doi.org/10.3390/mi14122220

Chicago

Peng, Fei, Chao Sun, Hui Wan, and Chengqun Gui. 2023. “An Improved 3D OPC Method for the Fabrication of High-Fidelity Micro Fresnel Lenses.” Micromachines 14 (12): 2220. doi:10.3390/mi14122220.