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Study on the impact of grating absorption on substrate temperature under intense laser irradiation.
- Source :
- Proceedings of SPIE; 7/17/2024, Vol. 12961, p1296107-1296107, 1p
- Publication Year :
- 2024
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 12961
- Database :
- Complementary Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Conference
- Accession number :
- 174385653
- Full Text :
- https://doi.org/10.1117/12.3006024