Influence of nitrogen vacancies on the decomposition route and age hardening of wurtzite Ti1−xAlxNy thin films.

MLA

Salamania, J., et al. “Influence of Nitrogen Vacancies on the Decomposition Route and Age Hardening of Wurtzite Ti1−xAlxNy Thin Films.” Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films, vol. 41, no. 6, Dec. 2023, pp. 1–13. EBSCOhost, https://doi.org/10.1116/6.0003074.

APA

Salamania, J., Farhadizadeh, A. F., Kwick, K. M. C., Schramm, I. C., Hsu, T. W., Johnson, L. J. S., Rogström, L., & Odén, M. (2023). Influence of nitrogen vacancies on the decomposition route and age hardening of wurtzite Ti1−xAlxNy thin films. Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films, 41(6), 1–13. https://doi.org/10.1116/6.0003074

Chicago

Salamania, J., A. F. Farhadizadeh, K. M. Calamba Kwick, I. C. Schramm, T. W. Hsu, L. J. S. Johnson, L. Rogström, and M. Odén. 2023. “Influence of Nitrogen Vacancies on the Decomposition Route and Age Hardening of Wurtzite Ti1−xAlxNy Thin Films.” Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films 41 (6): 1–13. doi:10.1116/6.0003074.