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Variable-angle, spectroscopic ellipsometry study on the repeated application of first contact polymer on silicon-based surfaces.
- Source :
- Proceedings of SPIE; 9/26/2023, Vol. 12666, p1266609-1266609, 1p
- Publication Year :
- 2023
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 12666
- Database :
- Complementary Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Conference
- Accession number :
- 173345566
- Full Text :
- https://doi.org/10.1117/12.2692390