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Impact of UV-ozone (UVO) treatment on optical and electrical properties of RF sputtered Ga2O3 thin films for opto-electronic application.
- Source :
- Proceedings of SPIE; 9/13/2023, Vol. 12653, p126530K-126530K-7, 1p
- Publication Year :
- 2023
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 12653
- Database :
- Complementary Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Conference
- Accession number :
- 173182978
- Full Text :
- https://doi.org/10.1117/12.2679102