3D SEM metrology of microstructures for high volume manufacturing.

MLA

Abdallah, Zeinab, et al. “3D SEM Metrology of Microstructures for High Volume Manufacturing.” Proceedings of SPIE, vol. 12802, Feb. 2024, p. 128020N–128020N–20. EBSCOhost, https://doi.org/10.1117/12.2675620.

APA

Abdallah, Z., Fay, A., & Bonnet, S. (2024). 3D SEM metrology of microstructures for high volume manufacturing. Proceedings of SPIE, 12802, 128020N–128020N–20. https://doi.org/10.1117/12.2675620

Chicago

Abdallah, Zeinab, Aurélien Fay, and Stéphane Bonnet. 2024. “3D SEM Metrology of Microstructures for High Volume Manufacturing.” Proceedings of SPIE 12802 (February): 128020N–128020N–20. doi:10.1117/12.2675620.