Cite
Effect of magnetron sputtering process parameters on the conductivity of thin metal film.
MLA
Liu, Shuangjie, et al. “Effect of Magnetron Sputtering Process Parameters on the Conductivity of Thin Metal Film.” AIP Advances, vol. 13, no. 9, Sept. 2023, pp. 1–12. EBSCOhost, https://doi.org/10.1063/5.0170746.
APA
Liu, S., Li, X., Hao, Y., Li, X., & Liu, F. (2023). Effect of magnetron sputtering process parameters on the conductivity of thin metal film. AIP Advances, 13(9), 1–12. https://doi.org/10.1063/5.0170746
Chicago
Liu, Shuangjie, Xingwang Li, Yongping Hao, Xing Li, and Fengli Liu. 2023. “Effect of Magnetron Sputtering Process Parameters on the Conductivity of Thin Metal Film.” AIP Advances 13 (9): 1–12. doi:10.1063/5.0170746.