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Fabrication of Micro-Cantilever Sensor Based on Clay Minerals for Humidity Detection.
- Source :
- Sensors (14248220); Aug2023, Vol. 23 Issue 15, p6962, 12p
- Publication Year :
- 2023
-
Abstract
- In this paper, novel humidity sensors based on montmorillonite, kaolinite, and composite films coated on micro-cantilevers were prepared to measure the relative humidity (RH) values by the deflection of a micro-cantilever (MC) at room temperature. The humidity-sensing properties, such as response and recovery, sensitivity, repeatability, humidity hysteresis, and long-term stability, were investigated in the range of working humidity (10–80% RH). The humidity response in the close humidity range of 10% RH to 80% RH revealed a linear increase in water absorption of montmorillonite, kaolinite, and montmorillonite/kaolinite mixed dispersant (1:1) as a function of RH with linear correlation factors between the humidity change and deflection estimated to be 0.994, 0.991, and 0.946, respectively. Montmorillonite's sensitivity was better than kaolinite's, with the mixed-clay mineral film's response falling somewhere in between. This research provides a feasible and effective approach to constructing high-performance MC humidity sensors that can be operated at room temperature based on clay minerals. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 14248220
- Volume :
- 23
- Issue :
- 15
- Database :
- Complementary Index
- Journal :
- Sensors (14248220)
- Publication Type :
- Academic Journal
- Accession number :
- 169927357
- Full Text :
- https://doi.org/10.3390/s23156962