Modeling of fatigue in polysilicon MEMS structures.

This paper presents an empirical approach to the modeling of fatigue in silicon MEMS structures. The approach is based on the regression analysis of stress-life data obtained from prior fatigue experiments on polysilicon and single crystal silicon. The possible directions for future modeling efforts are identified at the end of the paper, following a discussion on the implications of the current model fatigue life prediction. [ABSTRACT FROM AUTHOR]