Minimizing the Uncertainties Associated With the Measurement of Thermal Properties by the Transient Thermo-Reflectance Method.

The article presents an approach for optimizing the transient thermo-reflectance measurement of thermal properties. As electronic devices become smaller, their thermal design becomes more critical, making the knowledge of thermal properties essential to the overall design process. Additionally, new device structures and materials with superior properties are being developed, but many of these may have unknown thermo-physical properties. Moreover, recent studies have revealed that the thermal properties of thin-film materials used in electronics are dependent on the deposition process.