Correction: Modeling and analysis of MEMS capacitive pressure sensors with vertical comb fingers.

The online version of the original article can be found at https://doi.org/10.1007/s00542-023-05425-w B Microsystem Technologies b https://doi.org/10.1007/s00542-023-05425-w The original version of this article unfortunately contained a mistake the institution name "State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China" should be modified to "State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, 100194 Beijing, China". The name "Institute of Electronics, Chinese Academy of Sciences" is not available now, it has been changed to "Aerospace Information Research Institute, Chinese Academy of Sciences" Publisher's Note Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations. [Extracted from the article]