Theoretical investigation of Rayleigh surface acoustic wave propagation characteristics in c-axis-zigzag ScAlN film/silicon substrate structure.

MLA

Tominaga, Takumi, et al. “Theoretical Investigation of Rayleigh Surface Acoustic Wave Propagation Characteristics in C-Axis-Zigzag ScAlN Film/Silicon Substrate Structure.” Journal of Applied Physics, vol. 133, no. 20, May 2023, pp. 1–10. EBSCOhost, https://doi.org/10.1063/5.0144838.

APA

Tominaga, T., Takayanagi, S., & Yanagitani, T. (2023). Theoretical investigation of Rayleigh surface acoustic wave propagation characteristics in c-axis-zigzag ScAlN film/silicon substrate structure. Journal of Applied Physics, 133(20), 1–10. https://doi.org/10.1063/5.0144838

Chicago

Tominaga, Takumi, Shinji Takayanagi, and Takahiko Yanagitani. 2023. “Theoretical Investigation of Rayleigh Surface Acoustic Wave Propagation Characteristics in C-Axis-Zigzag ScAlN Film/Silicon Substrate Structure.” Journal of Applied Physics 133 (20): 1–10. doi:10.1063/5.0144838.