Study on irradiation effects by femtosecond-pulsed extreme ultraviolet in resist materials.

MLA

Hosaka, Yuji, et al. “Study on Irradiation Effects by Femtosecond-Pulsed Extreme Ultraviolet in Resist Materials.” Proceedings of SPIE, vol. 12498, Apr. 2023, p. 1249827. EBSCOhost, https://doi.org/10.1117/12.2670220.

APA

Hosaka, Y., Yamamoto, H., Ishino, M., Dinh, T.-H., Nishikino, M., Kon, A., Owada, S., Inubushi, Y., Kubota, Y., & Maekawa, Y. (2023). Study on irradiation effects by femtosecond-pulsed extreme ultraviolet in resist materials. Proceedings of SPIE, 12498, 1249827. https://doi.org/10.1117/12.2670220

Chicago

Hosaka, Yuji, Hiroki Yamamoto, Masahiko Ishino, Thanh-Hung Dinh, Masaharu Nishikino, Akira Kon, Shigeki Owada, Yuichi Inubushi, Yuya Kubota, and Yasunari Maekawa. 2023. “Study on Irradiation Effects by Femtosecond-Pulsed Extreme Ultraviolet in Resist Materials.” Proceedings of SPIE 12498 (April): 1249827. doi:10.1117/12.2670220.