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EUV lithography patterning using multi-trigger resist.

Authors :
Popescu, C.
O'Callaghan, G.
McClelland, A.
Storey, C.
Roth, J.
Jackson, E.
Robinson, A. P. G.
Source :
Proceedings of SPIE; 4/11/2023, Vol. 12498, p1249812-1249812, 1p
Publication Year :
2023

Details

Language :
English
ISSN :
0277786X
Volume :
12498
Database :
Complementary Index
Journal :
Proceedings of SPIE
Publication Type :
Conference
Accession number :
163951858
Full Text :
https://doi.org/10.1117/12.2658456
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