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Advanced In Situ TEM Microchip with Excellent Temperature Uniformity and High Spatial Resolution.
- Source :
- Sensors (14248220); May2023, Vol. 23 Issue 9, p4470, 12p
- Publication Year :
- 2023
-
Abstract
- Transmission electron microscopy (TEM) is a highly effective method for scientific research, providing comprehensive analysis and characterization. However, traditional TEM is limited to observing static material structures at room temperature within a high-vacuum environment. To address this limitation, a microchip was developed for in situ TEM characterization, enabling the real-time study of material structure evolution and chemical process mechanisms. This microchip, based on microelectromechanical System (MEMS) technology, is capable of introducing multi-physics stimulation and can be used in conjunction with TEM to investigate the dynamic changes of matter in gas and high-temperature environments. The microchip design ensures a high-temperature uniformity in the sample observation area, and a system of tests was established to verify its performance. Results show that the temperature uniformity of 10 real-time observation windows with a total area of up to 1130 μm<superscript>2</superscript> exceeded 95%, and the spatial resolution reached the lattice level, even in a flowing atmosphere of 1 bar. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 14248220
- Volume :
- 23
- Issue :
- 9
- Database :
- Complementary Index
- Journal :
- Sensors (14248220)
- Publication Type :
- Academic Journal
- Accession number :
- 163723123
- Full Text :
- https://doi.org/10.3390/s23094470