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Low-loss sputter coated aluminum nitride waveguides.
- Source :
- Proceedings of SPIE; 1/27/2023, Vol. 12424, p1242403-1242403, 1p
- Publication Year :
- 2023
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 12424
- Database :
- Complementary Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Conference
- Accession number :
- 163407209
- Full Text :
- https://doi.org/10.1117/12.2656323