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The Joy in imaging the Auger Electron Signal in a FESEM using a Segmented Annular BSED and Stage Bias.

Authors :
Griffin, B.J.
Suvorova, A.A.
Joy, D.C.
Michael, J.R.
Source :
Microscopy & Microanalysis; Aug2019 Supplement, p620-621, 2p
Publication Year :
2019

Details

Language :
English
ISSN :
14319276
Database :
Complementary Index
Journal :
Microscopy & Microanalysis
Publication Type :
Academic Journal
Accession number :
163212394
Full Text :
https://doi.org/10.1017/S1431927618003598