A miniaturized transit-time ultrasonic flowmeter based on ScAlN piezoelectric micromachined ultrasonic transducers for small-diameter applications.

MLA

Gao, Yunfei, et al. “A Miniaturized Transit-Time Ultrasonic Flowmeter Based on ScAlN Piezoelectric Micromachined Ultrasonic Transducers for Small-Diameter Applications.” Microsystems & Nanoengineering, vol. 9, no. 1, Apr. 2023, pp. 1–11. EBSCOhost, https://doi.org/10.1038/s41378-023-00518-y.

APA

Gao, Y., Chen, M., Wu, Z., Yao, L., Tong, Z., Zhang, S., Gu, Y. A., & Lou, L. (2023). A miniaturized transit-time ultrasonic flowmeter based on ScAlN piezoelectric micromachined ultrasonic transducers for small-diameter applications. Microsystems & Nanoengineering, 9(1), 1–11. https://doi.org/10.1038/s41378-023-00518-y

Chicago

Gao, Yunfei, Minkan Chen, Zhipeng Wu, Lei Yao, Zhihao Tong, Songsong Zhang, Yuandong Alex Gu, and Liang Lou. 2023. “A Miniaturized Transit-Time Ultrasonic Flowmeter Based on ScAlN Piezoelectric Micromachined Ultrasonic Transducers for Small-Diameter Applications.” Microsystems & Nanoengineering 9 (1): 1–11. doi:10.1038/s41378-023-00518-y.