Micro-electromechanical System Gas Sensors Based on CeO2 Nanoparticles.

In this study, X-ray diffraction (XRD) analysis was used to show that cerium oxide (CeO₂) nanoparticles have a face-centered cubic structure. CeO₂ thin films on micro-electromechanical system (MEMS) gas sensors, which are used to test their sensitivity to hydrogen (H₂), were prepared by dip coating. The test power of 116 mW (~300 °C) is the power consumption of different gas concentrations. Different gases such as NH₃, CO, and NO₂ were also tested and compared. The results showed that CeO₂ has a higher response at 50 ppm than at other concentrations. The structure of the CeO₂ material and its reaction mechanism with H₂ were examined and discussed. [ABSTRACT FROM AUTHOR]