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Enhanced Luminescence of Yb 3+ Ions Implanted to ZnO through the Selection of Optimal Implantation and Annealing Conditions.
- Source :
- Materials (1996-1944); Mar2023, Vol. 16 Issue 5, p1756, 13p
- Publication Year :
- 2023
-
Abstract
- Rare earth-doped zinc oxide (ZnO:RE) systems are attractive for future optoelectronic devices such as phosphors, displays, and LEDs with emission in the visible spectral range, working even in a radiation-intense environment. The technology of these systems is currently under development, opening up new fields of application due to the low-cost production. Ion implantation is a very promising technique to incorporate rare-earth dopants into ZnO. However, the ballistic nature of this process makes the use of annealing essential. The selection of implantation parameters, as well as post-implantation annealing, turns out to be non-trivial because they determine the luminous efficiency of the ZnO:RE system. This paper presents a comprehensive study of the optimal implantation and annealing conditions, ensuring the most efficient luminescence of RE<superscript>3+</superscript> ions in the ZnO matrix. Deep and shallow implantations, implantations performed at high and room temperature with various fluencies, as well as a range of post-RT implantation annealing processes are tested: rapid thermal annealing (minute duration) under different temperatures, times, and atmospheres (O<subscript>2</subscript>, N<subscript>2</subscript>, and Ar), flash lamp annealing (millisecond duration) and pulse plasma annealing (microsecond duration). It is shown that the highest luminescence efficiency of RE<superscript>3+</superscript> is obtained for the shallow implantation at RT with the optimal fluence of 1.0 × 10<superscript>15</superscript> RE ions/cm<superscript>2</superscript> followed by a 10 min annealing in oxygen at 800 °C, and the light emission from such a ZnO:RE system is so bright that can be observed with the naked eye. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 19961944
- Volume :
- 16
- Issue :
- 5
- Database :
- Complementary Index
- Journal :
- Materials (1996-1944)
- Publication Type :
- Academic Journal
- Accession number :
- 162349572
- Full Text :
- https://doi.org/10.3390/ma16051756