Cite
Computational analysis of vertical comb-drive microactuator with extended mirror for manipulation of light.
MLA
Sharma, Varun P., et al. “Computational Analysis of Vertical Comb-Drive Microactuator with Extended Mirror for Manipulation of Light.” Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics, vol. 40, no. 6, Dec. 2022, pp. 1–9. EBSCOhost, https://doi.org/10.1116/6.0002190.
APA
Sharma, V. P., Ganguli, T., & Shukla, R. (2022). Computational analysis of vertical comb-drive microactuator with extended mirror for manipulation of light. Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics, 40(6), 1–9. https://doi.org/10.1116/6.0002190
Chicago
Sharma, Varun P., Tapas Ganguli, and Rahul Shukla. 2022. “Computational Analysis of Vertical Comb-Drive Microactuator with Extended Mirror for Manipulation of Light.” Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics 40 (6): 1–9. doi:10.1116/6.0002190.