Influence of Deposition Temperature on the Structure and Current-Carrying Friction Performance of Cu Films by DC Magnetron Sputtering Technology.

MLA

Zhang, Hao, et al. “Influence of Deposition Temperature on the Structure and Current-Carrying Friction Performance of Cu Films by DC Magnetron Sputtering Technology.” Lubricants (2075-4442), vol. 11, no. 1, Jan. 2023, p. 8. EBSCOhost, https://doi.org/10.3390/lubricants11010008.

APA

Zhang, H., Le, K., Wang, C., Sun, J., Xu, S., & Liu, W. (2023). Influence of Deposition Temperature on the Structure and Current-Carrying Friction Performance of Cu Films by DC Magnetron Sputtering Technology. Lubricants (2075-4442), 11(1), 8. https://doi.org/10.3390/lubricants11010008

Chicago

Zhang, Hao, Kai Le, Chen Wang, Jianbo Sun, Shusheng Xu, and Weimin Liu. 2023. “Influence of Deposition Temperature on the Structure and Current-Carrying Friction Performance of Cu Films by DC Magnetron Sputtering Technology.” Lubricants (2075-4442) 11 (1): 8. doi:10.3390/lubricants11010008.