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Resonant micromirror with symmetrical AIN thin film actuators.
- Source :
- Proceedings of SPIE; 7/5/2022, Vol. 12218, p122180B-122180B-8, 1p
- Publication Year :
- 2022
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 12218
- Database :
- Complementary Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Conference
- Accession number :
- 159809810
- Full Text :
- https://doi.org/10.1117/12.2633350