Erratum: "Hollow cathode enhanced capacitively coupled plasmas in Ar/N2/H2 mixtures and implications for plasma enhanced ALD" [J. Vac. Sci. Technol. B 40, 044002 (2022)].

Authors :: Boris, David R.
Johnson, Michael J.
Eddy Jr., Charles R.
Walton, Scott G.
Source :: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Sep2022, Vol. 40 Issue 5, p1-1, 1p
Publication Year :: 2022
Abstract: The driven electrode is a circular stainless steel plate (diameter = 64 mm, thickness 5 cm) that includes a 3 × 3 array of 10 mm diameter through-holes (the "hollow cathodes"). The hollow cathode enhanced capactively coupled plasma system studied in this work was supplied by Meaglow Ltd. (circa 2013). Erratum: "Hollow cathode enhanced capacitively coupled plasmas in Ar/N<subscript>2</subscript>/H<subscript>2</subscript> mixtures and implications for plasma enhanced ALD" [J. Vac. [Extracted from the article]

Language :: English
ISSN :: 21662746
Volume :: 40
Issue :: 5
Database :: Complementary Index
Journal :: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics
Publication Type :: Academic Journal
Accession number :: 159299412
Full Text :: https://doi.org/10.1116/6.0002172

Full Text Access

Tools