Guest Editorial Special Section on the 2020 and 2021 SEMI Advanced Semiconductor Manufacturing Conferences.

We are very pleased to introduce this Special Section covering ASMC 2020 and ASMC 2021. These two conferences were held virtually, like most other technical conferences over the last two years; fortunately, the technical community has now reverted to in-person conferences, allowing attendees more personal interaction and the ability to focus on the conference. This includes ASMC 2022 which was held in May of this year, as we hope the COVID-19 pandemic is for the most part behind us. [ABSTRACT FROM AUTHOR]