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SiO x Tunneling Diode Arrays With Uniform Electron Emission.
SiO x Tunneling Diode Arrays With Uniform Electron Emission.
- Source :
- IEEE Electron Device Letters; Aug2022, Vol. 43 Issue 8, p1339-1342, 4p
- Publication Year :
- 2022
-
Abstract
- Uniform electron emission (EE) from on-chip micro-emitter arrays based on SiOx tunneling diodes (STDs) in electroformed SiOx is reported. EE from STDs is found to be accompanied with visible light emission, which enables us to resolve the spatial distribution of EE from the micro-emitter arrays and emitter-to-emitter uniformity at the microscale resolution via optical imaging. Up to 99% micro-emitters in a 15 $\times15$ array is observed to work simultaneously with good emitter-to-emitter uniformity, showing an emission current of 0.56 mA and an emission density of 626 mA/cm2. The good uniformity is attributed to the insensitivity of EE from STDs to the microfabricated structures of micro-emitters. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 07413106
- Volume :
- 43
- Issue :
- 8
- Database :
- Complementary Index
- Journal :
- IEEE Electron Device Letters
- Publication Type :
- Academic Journal
- Accession number :
- 158241883
- Full Text :
- https://doi.org/10.1109/LED.2022.3184948