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High-speed wafer magnetic field inspection for semiconductor manufacturing.

Authors :
Ueyama, Shinji
Kim, Jinseob
Numata, Mitsunori
Kim, Wookrae
Kim, Ingi
Lee, Myungjun
Source :
Proceedings of SPIE; 1/20/2022, Vol. 12053, p120530G-120530G-9, 1p
Publication Year :
2022

Details

Language :
English
ISSN :
0277786X
Volume :
12053
Database :
Complementary Index
Journal :
Proceedings of SPIE
Publication Type :
Conference
Accession number :
158111514
Full Text :
https://doi.org/10.1117/12.2614750