Capacitive humidity sensing properties of freestanding bendable porous SiO2/Si thin films.

Authors :: Park, Soobin
Seo, Jinmyeong
Park, Jungjoon
Hwang, Inseong
Lee, Han-Seung
Jung, Hyunsung
Yoo, Bongyoung
Source :: Scientific Reports; 7/8/2022, Vol. 12 Issue 1, p1-8, 8p
Publication Year :: 2022
Abstract: The fabrication of freestanding bendable films without polymer substrates is demonstrated as a capacitive humidity-sensing material. The bendable and porous SiO<subscript>2</subscript>/Si films are simply prepared by electrochemical-assisted stripping, metal-assisted chemical etching, followed by oxidation procedures. The capacitive humidity-sensing properties of the fabricated porous SiO<subscript>2</subscript>/Si film are characterized as a function of the relative humidity and frequency. The remarkable sensing performance is demonstrated in the wide RH range from 13.8 to 79.0%. The sensing behavior of the porous SiO<subscript>2</subscript>/Si film is studied by electrochemical impedance spectroscopy analysis. Additionally, the reliability of the porous SiO<subscript>2</subscript>/Si sensing material is confirmed by cyclic and long-term sensing tests. [ABSTRACT FROM AUTHOR]

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