Back to Search Start Over

33 GHz Overmoded Bulk Acoustic Resonator.

33 GHz Overmoded Bulk Acoustic Resonator.

Authors :
Schaffer, Zachary
Simeoni, Pietro
Piazza, Gianluca
Source :
IEEE Microwave & Wireless Components Letters; Jun2022, Vol. 32 Issue 6, p656-659, 4p
Publication Year :
2022

Abstract

In this work, we present a new class of thickness extensional microelectromechanical resonator, the overmoded bulk acoustic resonator (OBAR) for filtering applications in the 5G millimeter wave (mm-wave) spectrum. This resonator operates in a second overtone thickness mode with approximately equal thickness electrodes and piezoelectric layer so that acoustic energy is distributed evenly between the different layers. Compared to a fundamental mode at a fixed frequency, the OBAR possess a $3\times $ thicker piezo layer and 5– $10\times $ thicker metal electrodes, enabling manufacturable 30–60 GHz devices. We demonstrate the OBAR experimentally through fabrication of a Pt-AlN-Al device with electromechanical-coupling coefficient ($k_{t}^{2}$) of 1.7%, and series resonance quality factor ($Q_{s}$) of 110 at 33 GHz. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
15311309
Volume :
32
Issue :
6
Database :
Complementary Index
Journal :
IEEE Microwave & Wireless Components Letters
Publication Type :
Academic Journal
Accession number :
157324951
Full Text :
https://doi.org/10.1109/LMWC.2022.3166682