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Study on the surface flattening of borosilicate glass in chemical mechanical polishing.
- Source :
- Proceedings of SPIE; 7/31/2022, Vol. 12244, p1224407-1224407, 1p
- Publication Year :
- 2022
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 12244
- Database :
- Complementary Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Conference
- Accession number :
- 157154954
- Full Text :
- https://doi.org/10.1117/12.2635202