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Nanostructure engineering in porous columnar thin films: recent advances.

Authors :
Steele, John J.
Brett, Michael J.
Source :
Journal of Materials Science: Materials in Electronics; Apr2007, Vol. 18 Issue 4, p367-379, 13p
Publication Year :
2007

Abstract

Glancing angle deposition (GLAD) is a physical vapour deposition method used to fabricate highly functional thin films with an engineerable columnar morphology. Recent developments in GLAD technology have produced columnar nanostructures of increased complexity, including periodic, nanofibrous, perforated, and graded porosity thin films for use in applications ranging from sensors and actuators to optical filters, microfluidics, and catalysis. A brief review of GLAD methodology and historical developments is followed by a discussion of the latest developments in this field. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
09574522
Volume :
18
Issue :
4
Database :
Complementary Index
Journal :
Journal of Materials Science: Materials in Electronics
Publication Type :
Academic Journal
Accession number :
156890294
Full Text :
https://doi.org/10.1007/s10854-006-9049-8